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Reliable Vertical Semiconductor Screw Vacuum Pump

The screw vacuum pump has a simple structure, but its processing technology requires higher requirements. It must ensure that the height between rotors is parallel, and that between rotors and between rotors and the inner wall of the pump body, there is a very small gap and no friction caused by contact, so as to ensure the realization of gas transmission and reduce gas backflow without the need for oil lubrication and sealing.The screw vacuum pump has a simple structure, but its processing technology requires higher requirements. It must ensure that the height between rotors is parallel, and that between rotors and between rotors and the inner wall of the pump body, there is a very small gap and no friction caused by contact, so as to ensure the realization of gas transmission and reduce gas backflow without the need for oil lubrication and sealing.

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Quantity:
  • Kaien

Summary

The dry screw vacuum pump is a rotor that uses a pair of parallel screws to make synchronous, high-speed and reverse rotation in the pump housing. The rotor and the inner wall of the pump body form a number of sealing spaces. During the rotation, the continuous transmission of gas is formed to achieve the purpose of suction and exhaust.

 luogan_chanpin006

The screw vacuum pump has a simple structure, but its processing technology requires higher requirements. It must ensure that the height between rotors is parallel, and that between rotors and between rotors and the inner wall of the pump body, there is a very small gap and no friction caused by contact, so as to ensure the realization of gas transmission and reduce gas backflow without the need for oil lubrication and sealing.


Technical parameters

Type
(Air cooled series)

Basic parameters


Pumping speed
(m3/h)

Pumping speed
(L/s)

Presure limit

(Pa)

Power (kW)

revolution (rpm)

Inlet caliber

outlet caliber

Pump head weight
(kg)

noise

dB(A)

Overall dimension
(length*width*height)
(mm)

LG-5

5

1.5

≤5

0.37

2720

KF14

KF14

14

≤68

510x200x260

LG-10

10

3

≤5

0.75

2840

KF16

KF16

30

≤68

620x280x300

LG-20

20

6

≤5

1.1

2840

KF25

KF25

45

≤70

770x350x370

LG-30

30

9

≤10

1.5

2850

KF40

KF40

55

≤71

920x440x450

LG-50

50

15

≤10

2.2

2850

KF40

KF40

65

≤72

1080x500x550

LG-70

70

20

≤30

3

2870

KF50

KF40

72

≤72

1100x580x600

LG-80

80

23

≤30

3

2870

KF50

KF40

78

≤72

1180x660x680

LG-90

90

25

≤30

4

2890

KF63

KF50

85

≤73

1250x720x750

LG-100

100

30

≤30

4

2890

KF63

KF50

93

≤73

1310x750x810

chanpin_fengleng001

Air cooling  Dry screw vacuum pump


Application scope

Screw vacuum pumps have been widely used in multiple industries, especially in areas with high requirements for clean vacuum. These application areas include:

1.Semiconductor industry: Screw vacuum pumps play a crucial role in semiconductor production, used in vacuum processes such as dry etching and chemical vapor deposition in chip manufacturing.

2.Chemical industry: In the chemical industry, screw vacuum pumps are used for various chemical reactions and separation processes, such as gas purification and gas recovery.

3.Medical industry: Screw vacuum pumps are widely used in medical equipment, such as vacuum systems for CT machines, nuclear magnetic resonance machines, etc.

4.Research field: Screw vacuum pumps are also applied in various scientific research, such as material analysis, vacuum experiments, etc.

5.Food industry: In food processing and packaging, screw vacuum pumps are used to improve the hygiene and quality of food.

6.Pharmaceutical industry: Screw vacuum pumps also have important applications in the pharmaceutical industry, especially in production processes that require high levels of clean vacuum.


The advantages of dry screw vacuum pumps

1、Clean and environment-friendly, the working chamber is free of lubricating oil, which is conducive to medium recovery, can obtain clean vacuum, no oil consumption, waste water discharge, and no pollution to the environment.

2、The vacuum degree is high, the limit vacuum degree is ≤ 1Pa, and the pumping capacity in the high vacuum area is large.

3、The anti-corrosion design is optional. The flow passage parts are made of titanium, stainless steel, nano ceramics, spraying NIP alloy and other materials and anti-corrosion coatings.

4、The condensable gas and a small amount of dust gas can be removed, and an automatic purging device is designed.

5、Special shaft seal design prevents mutual pollution between pumped medium and lubricating oil.

6、Variable pitch screw pump saves energy and has low noise.

7、The operation is stable, the rotor is subject to fine dynamic balance test, and the operation vibration is small.

8、High configuration, sealed in Germany, bearing SKF/NSK, gear grade 5 grinding.


Authoritative certificate

Strong technical strength, excellent equipment, and products strictly managed in accordance with the ISO9001 quality system.

zhengshu001

zhengshu002


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     Phone : +86-130-0288-6558
    E-mail : 18668923131@163.com
    Telephone:+86-0531-8750-3139
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    Company production plant : No. 11111, Second Ring South Road, Jinan City, Shandong Province
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