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Reliable Vertical Semiconductor Screw Vacuum Pump

The screw vacuum pump has a simple structure, but its processing technology requires higher requirements. It must ensure that the height between rotors is parallel, and that between rotors and between rotors and the inner wall of the pump body, there is a very small gap and no friction caused by contact, so as to ensure the realization of gas transmission and reduce gas backflow without the need for oil lubrication and sealing.The screw vacuum pump has a simple structure, but its processing technology requires higher requirements. It must ensure that the height between rotors is parallel, and that between rotors and between rotors and the inner wall of the pump body, there is a very small gap and no friction caused by contact, so as to ensure the realization of gas transmission and reduce gas backflow without the need for oil lubrication and sealing.

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I. The working chamber is clean and eco-friendly, with no lubricating oil. This helps with medium recovery and ensures a clean vacuum, without oil consumption or waste water discharge, minimizing pollution to the environment.

II. It has a high vacuum degree, with a limit vacuum degree of ≤ 1Pa, and a large pumping capacity in the high vacuum area.

III. Optional anti-corrosion design includes flow passage parts made of titanium, stainless steel, nano ceramics, spraying NIP alloy, and other corrosion-resistant materials and coatings.

IV. It can remove condensable gas and a small amount of dust gas, with an automatic purging device designed for this purpose.

V. The special shaft seal design prevents contamination between the pumped medium and lubricating oil.

VI. The variable pitch screw pump is energy-saving and operates with low noise.

VII. It has a stable operation, with the rotor undergoing a fine dynamic balance test to ensure minimal vibration during operation.

VIII. It is of high configuration, with German seals and internationally renowned bearing positions, and gear grade 5 grinding.


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     Phone : +86-130-0288-6558
    E-mail : 18668923131@163.com
    Telephone:+86-0531-8750-3139
    Company headquarters2603-B, Building B1C, Qilu Gate, Greenland, Huaiyin District, Jinan City, Shandong Province
    Company production plant : No. 11111, Second Ring South Road, Jinan City, Shandong Province
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